About: http://webisa.webdatacommons.org/48865256

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After the production of a design test pattern, an evaluation photomask having a mask pattern based on the design test pattern is produced.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com