About: http://webisa.webdatacommons.org/48915720

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If lower layer 24 of a microbeam is silicon dioxide, then examples of materials available for upper layer 22 that exhibit a higher TCE include: silicon nitride, polycrystalline silicon, titanium, aluminum and most metals.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com