About: http://webisa.webdatacommons.org/48954227

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown, wafer 14 is positioned on a substrate holder 15 made from a thermal insulating material such as quartz.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com