About: http://webisa.webdatacommons.org/49008602

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As materials for the substrate, especially for example silicon, SOI substrate, SiC, graphite, diamond, quartz glass, GdGa-garnet or also III-V semiconductor and III-V nitride should be considered.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com