About: http://webisa.webdatacommons.org/49012871

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the protective film, a film capable of transmitting light such as an SiNx film, a boro-phospho-silicate glass (BPSG) film, a phospho-silicate glass (PSO) film, an SiO2 film or the like can be u
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca