About: http://webisa.webdatacommons.org/49123238

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a material of the passivation film, inorganic materials such as silicon dioxide, silicon nitride, and alumina are used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com