About: http://webisa.webdatacommons.org/49199443

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 4 c, a conductive material, such as copper (preferred), aluminum, gold, silver, alloys thereof, and the like, is disposed in the openings 134 (see FIG. 4 b) to form conductive columns 122.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com