| http://www.w3.org/ns/prov#value | - c multilayer film, a Mo/Be periodic multilayer film, a Mo-compound/Si-compound periodic multilayer film, a Si/Nb periodic multilayer film, a Si/Mo/Ru periodic multilayer film, a Si/Mo/Ru/Mo periodic multilayer film, and a Si/Ru/Mo/Ru periodic multilayer film. [0124] The light absorber film may be made of a material such as Ta, Ta alloy (for example, a material containing Ta and B, a material conta
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