| http://www.w3.org/ns/prov#value | - columnar shape on a corresponding one of the plurality of wiring patterns, and which each have an exposed end face; a ground layer formed on substantially an entire upper surface of the insulating film except for areas at which the plurality of wiring patterns are formed; and a ground projection electrode which is formed in a columnar shape on said ground layer, and which has an exposed end face.
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