| http://www.w3.org/ns/prov#value | - 20120139064MEMS SENSOR AND METHOD FOR PRODUCING MEMS SENSOR, AND MEMS PACKAGE - A capacitance type gyro sensor includes a semiconductor substrate, a first electrode integrally including a first base portion and first comb tooth portions and a second electrode integrally including a second base portion and second comb tooth portions, formed by processing the surface portion of the semiconductor sub
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