PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • According to another aspect of the present invention, the developing method of the present invention is a method of supplying a developing solution to an entire face of a substrate to perform a developing treatment, comprising the steps of: moving a developing solution supply nozzle at a predetermined speed at least from one end to another end of the substrate while the developing solution is bein
http://www.w3.org/ns/prov#wasQuotedFrom
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