| http://www.w3.org/ns/prov#value | - 8] According to one or more embodiments, the measurements of the plan are adjusted wafer-to-wafer and/or within-wafer. [0019] According to one or more embodiments, the product is a semi-conductor wafer and the manufacturing process is an automated semi-conductor manufacturing process. [0020] According to one or more embodiments, the plan further includes information representative of a metrology r
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