About: http://webisa.webdatacommons.org/4948559

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, their is a need for a method and apparatus for the more efficient and uniform production of a plasma for wafer processing, and particularly for a compact and simple plasma generator for such applications.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com