| http://www.w3.org/ns/prov#value | - Accordingly, it is desirably made of a material withstanding the microwave plasma, that is, a material excellent in both the heat resistance and the corrosion resistance, while since the deposited film may stick to the surface, the stuck film being exfoliated or scattered in the deposition operation over long time to stick to the deposited film being formed, causing defects such as pin holes, resu
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