| http://www.w3.org/ns/prov#value | - 4 *Oct 11, 2012Feb 21, 2013Semiconductor Energy Laboratory Co., Ltd.Display device and electronic appliance including the display device* Cited by examinerClassifications U.S. Classification257/59, 257/72, 257/E29.137, 257/E29.278, 257/347, 257/E27.111, 257/208, 257/210, 257/359, 257/E29.151International ClassificationH01L21/77, H01L21/84, H01L27/32, H01L29/786, H01L27/12, H01L29/423, H01L29/49, G
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