PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • According to another aspect of the present invention, there is provided a method of fabricating a grating device including grating portions that diffract light, the method including the steps of; preparing a first wafer and a second wafer, the first wafer including a plurality of first substrates having a surface on which a plurality of first projections extend in a predetermined direction and are
http://www.w3.org/ns/prov#wasQuotedFrom
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