About: http://webisa.webdatacommons.org/49748800

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	chnology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6962520Aug 24, 2004Nov 8, 2005Micron Technology, Inc.Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpiecesUS6969306Aug 19, 2004Nov 29, 2005Micron Technology, Inc.Apparatus for planarizing micro
http://www.w3.org/ns/prov#wasQuotedFrom	google.com