| http://www.w3.org/ns/prov#value | - Accordingly, C.sub.2 H.sub.4 is not preferred not only because a vertical or forward taper cross-section cannot be obtained but also because a small RIE lag characteristic cannot be attained.As described above, when one of or a combination of straight chain saturated hydrocarbons represented by C.sub.n H.sub.2n+1 (wherein n is a positive integer), such as CH.sub.4, C.sub.2 H.sub.6, C.sub.4 H.sub.1
|
