About: http://webisa.webdatacommons.org/49810521

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	content thereof in the carbon-based protective layer is preferably less than 50 atm %, and in the case of the abovementioned semi-metals and metals such as Si, Ti and the like, the content thereof is preferably not more than 20 atm %.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com