PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • According to the invention, the lithographic device with the displaceable substrate holder is characterized in that the positioning device used therein is a positioning device according to the invention, wherein each of the two object holders of the positioning device is a substrate holder of the lithographic device, and the operational position of the substrate holders is a position in which a su
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com