About: http://webisa.webdatacommons.org/50277049

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A pattern on the third photoresist is formed such that the insulating material is exposed except for a portion corresponding to the trench.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com