About: http://webisa.webdatacommons.org/50537076

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It could be, for example, an LCD. The thermal processing to which the present invention is applied could be other than such as CVD; it could be oxidation, diffusion, or annealing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com