About: http://webisa.webdatacommons.org/50551861

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is believed that many of the silicon precursors or the nitrogen precursors described herein may decompose or disassociate at a low temperature, such as about 550??? C. or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com