About: http://webisa.webdatacommons.org/50914778

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate electrodes 52 and 54 themselves may comprise any suitable conductive material, such as aluminum or highly-doped polycrystalline silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com