About: http://webisa.webdatacommons.org/5103086

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, where the substrate comprises an insulator, such as silicon oxide, a fluorocarbon etch comprising CF4 or C2F6 can be used to etch the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com