About: http://webisa.webdatacommons.org/51046180

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This first non-selective etch step is then followed by two selective etch steps rather than one such step as in the case of the first embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es