About: http://webisa.webdatacommons.org/51221793

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The short circuit-preventing insulating films 2013a and 2013b may have a thickness in the range of 200-3000 ??? and may be formed as a film of an inorganic insulating substance, such as SiO2, TiO2 or Ta2 O5, e.g., by sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es