About: http://webisa.webdatacommons.org/51305489

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These processes at the tool location may include, for example, growing processes such as epitaxial growth processes and chemical vapor deposition processes, sputtering, etching, masking and other processes well known in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com