About: http://webisa.webdatacommons.org/51322057

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The top handle substrate 180 may comprise a ceramic material, a semiconductor material, or a dielectric material such as glass or aluminum oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com