About: http://webisa.webdatacommons.org/51388672

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, using patterned resist 25 as mask, a p type impurity such as boron (B) and BF2 is implanted into the main surface of the silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com