About: http://webisa.webdatacommons.org/51408577

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sensor medium may be deposited as a film onto interdigitated electrodes, e.g. made of Au, which were deposited onto an inert substrate, e.g. by lithographic techniques, or both electrodes may be deposited on top of the film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com