About: http://webisa.webdatacommons.org/51437837

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process of the present invention is performed on a substrate 25 of a semiconductor material, for example a silicon or gallium arsenide wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com