About: http://webisa.webdatacommons.org/51466178

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method for manufacturing a semiconductor device of claim 8, wherein the gas includes a gas including fluorine, oxygen gas, and argon gas. 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com