About: http://webisa.webdatacommons.org/51535367

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The spacers 348 may have a multilayer structure and may include silicon oxide, silicon nitride, silicon oxynitride, or other dielectric material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com