About: http://webisa.webdatacommons.org/51577965

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plasma also creates ions containing Y, Ba and Cu, for example Y(thd)2 and the like, which react and result in deposition of the desired film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com