About: http://webisa.webdatacommons.org/51585452

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, processing including film formation, etching, and ashing is performed after the inside of the process chamber is brought to a vacuum state.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au