About: http://webisa.webdatacommons.org/51595271

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The standard building-block process consists of depositing and photolithographically patterning alternate layers of low-stress polycrystalline silicon (also termed polysilicon) and a sacrificial material such as silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com