About: http://webisa.webdatacommons.org/51635815

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the sputter particles are, e.g. Ti, the sputter particles react with the introduced nitrogen gas, thereby forming a TiN film on the wafer W.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es