About: http://webisa.webdatacommons.org/51640138

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The thickness of the grain in the present invention is 0.2 ??m or less, preferably 0.1 ??m or less, and particularly preferably 0.06 ??m or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com