About: http://webisa.webdatacommons.org/51858637

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	5. The detector of claim 1, wherein: the substrate is silicon; the dielectric layer is SiO.sub.2; the electrodes comprise conductive material; and the polymer layer is a material having a low dielectric constant, porosity, and/or a high
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com