About: http://webisa.webdatacommons.org/51943297

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The properties of the layer, in particular thickness and structure, can therein be set especially through the power density, the quantity and composition of the gas utilized, the temperature of the substrate and the web [transport] rate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com