About: http://webisa.webdatacommons.org/52027603

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Phosphine(PH.sub.3) is used as the doping gas, and the acceleration voltage is 60 to 90 kV, e.g. 80 kV. The dose is 1.times.10.sup.15 to 8.times.10.sup.15
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com