About: http://webisa.webdatacommons.org/52048134

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The combination of fan filter unit 35 inside the interface and other arrangements are the same as those for the substrate transport pod for 300 mm wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com