About: http://webisa.webdatacommons.org/52261279

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then the shallow trench is filled with insulating materials, such as silicon dioxide, by high-density plasma-chemical vapor deposition (HDPCVD) and so on.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com