About: http://webisa.webdatacommons.org/52288571

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The source electrode 9 and the pixel electrode 14 are obtained as follows: a metal film made of a material such as Ta and Al is formed with a film thickness of approximately 3000 ???, and the metal film is patterned into a desired shape.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com