About: http://webisa.webdatacommons.org/52343728

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereafter, a process for incorporating a compounding material, such as oxygen or nitrogen, into the grain boundaries of the TiN thin film 32 is executed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com