About: http://webisa.webdatacommons.org/52374460

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The portion of the blanket polysilicon layer extending above the insulating layer is then removed using a planarization process such as CMP or a dry etch.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com