About: http://webisa.webdatacommons.org/52377624

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, access transistors or other devices have been already fabricated on a silicon or SOI wafer at a desired eventual memory pitch (e.g., 20-50 nm).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com