About: http://webisa.webdatacommons.org/52434666

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deposition methods includes physical vapor deposition such as vacuum deposition, sputtering, and ion plating, chemical vapor deposition, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es