About: http://webisa.webdatacommons.org/52682763

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 32, wherein the sample beam has an elongated cross-section, and wherein the small, compact spot is a small, substantially square spot.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au